가스용 최신 디지털 제어 MFC 질량 유량 컨트롤러, SLA5800 Biotech MassFlowController

BROOKS INSTRUMENT SLA585081BAB1A2S1

SLA5800 Biotech - MFC - Digitally controlled mass flow controller for gas, Mass Flow Controller
elastomer-sealed mass flow controller, flow control, flow meter, flow controller, thermal mass flow
BROOKS INSTRUMENT Type SLA585081BAB1A2S1
Ser. No. 01C00500222
Year of manufacture 2020 (new / unused in original packaging)
SLA5800 Biotech series
Option package Biotech Premium Packet Code T
Mains connection 13.5 - 27 VDC (plug M8, 5 pin, male)
Power consumption max. 10 watts
PROFINET interface (2x RJ-45)
Visual display 2 LEDs (NET / MOD)
Gas connection 6 mm Swagelok
Valve design Normally closed
User gas O2 (oxygen) Active - Multiple / O2 (oxygen), N2 (nitrogen), CO2 (carbon dioxide), AIR (air)
Calibration gas N2 (nitrogen)
Flow control ranges (full scale) 20000 sccm (20 liters / minute)
Maximum inlet pressure 4500 psi (300 bar)
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Normal operation Pressure differential 60 psig (4 bar)
Control range 2% to 100% of full scale (range of mechanism)
Typical accuracy from 20 to 100 % ± 0.9 % of set point for 20 to 100 % of full scale
Typical accuracy from 2 to 20 % ± 0.18 % of full scale for 2 to 20 % of full scale
Repeatability ± 0.2 % of the measured value
Resolution 0.1 % of full scale
Typical response time of the controller

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