08 마세베온 스테이션 + LC 탈기 장치

Masevon Station Chamber Up-Down + + LC Degassing Unit

1.Introduction:
1. This document describes the functional requirements regarding a;
1.1. LC tray degassing chamber
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1.2. LC tray degassing chamber is a (controlled vacuum chamber) in which
an aluminum tray containing LC liquid is degassed in a vacuum
environment during a period of time (i.e. entrapped air is evacuated)
Vacuum profiles;
1.1. Pressure set points adjustable between 1.103 and 1.10-3mBar
1.1.1. Measurement range: 1.103 – 5.10-4
1.2. Time set points adjustable between 1 and 600min per step
1.2.1. Degassing step (D) can be minutes to days
1.3. Evacuation and ventilation rates must be controllable
1.4. The evacuation cycle (A – D) is performed automatically
1.4.1. The vent step (E) must be activated manually (operator)
1.5. Typical degassing profile
2.Interior;
2.1.Stainless steel (aluminum) polished process chamber (inside)
2.1.1. Leak rate to be discussed
2.2. LC-tray (adaptation) drawer to easily (un-)load the LC-tray (no shock/shake
movement allowed), see Section 2 LC-tray dimensions and appendix 1
2.3. LC tray must be level (waterpas) at all times to prevent LC spillage
2.4.Chamber must be easily/quickly accessible for cleaning and/or LC tray
(un)loading
2.5.Chamber inside must be polished for easy cleaning and prevention of
contamination and/or moisture collection
2.6.Monitoring (window) possibility of the degassing cycle i.e. monitoring LC
liquid surface behavior in the LC tray
2.7.No process contamination caused by chamber material (-manufacturing)

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