Measuring system

Zeiss FIB Auriga 60

Auriga 60 Computer-Controlled FE-SEM with patented GEMINI® electron optics and field emission cathode, designed for analytical applications and high-resolution imaging under high-vacuum conditions.
Year of manufacture: 2011
FIB column type: Cobra FIB column
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SEM column type: Schottky field emitter
Installed detectors:
• SESI (commercial)
• InLens
• ESB
• 4QBS (pneumatic)
• STEM (pneumatic)
• EDX X-MAX 80 mm (Oxford)
• EBSD (HKL Channel 5)
• Charge compensation
Gas injection system: Platinum
Maintenance report: The system has been serviced annually, with a service report provided each time.
Operating hours: 13,290.33 hours (with current filament)
PC and software included: Yes
Included components: All pumps, cooling systems, and control units are included, except for the dampers.
Software Version:
• SEM: SmartSEM Version 6.00 (June 9, 2016)
• EDX: INCA software package – Version 5.03
Price: Negotiable price excluding VAT and delivery

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