Ser. No. 1-0846A, internal no. 6670, system no. 266.700 / 266.701 / 266.771 / 266.773 / 266.779 / 266.793 / 266.809 / 280.494, dimensions (L/W) approx. 41 x 6 m, H with platforms approx. 6,200 mm, cooling capacity approx. 950 kW, cooling water consumption approx. 120 m³/h, transmission/reflection measurement system, ionization unit, twin cathode (performance enhancement), vacuum chambers K1 to K7, carrier transport system with return unit K8, entry airlock, intermediate chamber, rotary chamber, transfer chamber, process chamber, transfer chamber, rotary chamber, sputter section, pump section, horizontal/vertical heater, with gondola and carousel, 2 loading stations, coolant circuit, process gas, pump sections, cleanroom with personnel and material airlock, approx. 30 control cabinets (upper level), control center with computers, monitors, software with licenses, transmission measurement device, optimized in 2017, control station, office furniture, server cabinet, int. no. WDEFIW913, workstation, mfr. HP, Intel Core i2 processor, keyboard, mouse, 22" TFT monitor, mfr. Samsung, type SyncMaster 2243, handling robot, mfr. Fanuc, type M-710I, year 2019, system no. 236.529.000, with gripper arm, plexiglass safety enclosure, power supply, manual control, vertical flat glass washing and drying machine, mfr. Schraml, type Topclear Spezial / Super 13-26, year 2017, consisting of: ser. no. 2106/17, system no. 266.776.000, washing and drying exclusively for flat glass panes, maximum height 1,600 mm per pass, glass thicknesses from 3 - 12 mm, working speed from 1 - 5 m/min, comprising: infeed module, washer, washing unit with brushes, outfeed module, washer, fan housing with air filter, water tanks with pumps, control panel, electrical cabinet, on platform approx. 16 various steel cabinets, accessories, spare parts.
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